Comparison of Etching Effects Using Deep Ultraviolet (DUV) and Vacuum Ultraviolet/Deep Ultraviolet (VUV/DUV) Irradiation on Multiwalled Carbon Nanotubes
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چکیده
منابع مشابه
Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics
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ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2015
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.66.467